Micro and Smart System Technology

Poly zirconate titanate ✘ Lead zirconate tartarate ✘ Poly zirconate trioxide ✘ Poly zirconate tetranitrate ✔

PZT ✘ Roscelle salt ✘ Quartz ✘ None of the mentioned ✔

Copper ✘ Carbon particles ✘ Silver particles ✘ None of the mentioned ✔

1 ✘

1 ✘

Epoxy resin ✘ Silicon resin ✘ Phenolic resin ✘ None of the mentioned ✔

Silicon nitride ✘ Parylene D ✘ Silicon oxide ✘ None of the mentioned ✔

Inertial sensors ✘ Pressure sensors ✘ Voltage sensors ✘ Humidity sensors ✔

Macro electro magnetism ✘ Macro electro mechanism ✘ Micro electro mechanism ✘ Micro electro magnetism ✔

Micro speaker ✘ Pressure transducer ✘ Bourden element ✘ All of the mentioned ✔